Fabrication of semi-continuous profile Diffractive Optical Elements for beam shaping by Electron Beam Lithography

✍ Scribed by A. Nottola; A. Gerardino; M. Gentili; E. Di Fabrizio; S. Cabrini; P. Melpignano; G. Rotaris

• Book ID: 108411109
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 589 KB
• Volume: 53
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(00)00325-7