Multi-step electron beam technology for the fabrication of high performance diffractive optical elements

✍ Scribed by A. Kowalik; K. Góra; Z. Jaroszewicz; A. Kołodziejczyk

• Book ID: 108207402
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 484 KB
• Volume: 77
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.12.036