✦ LIBER ✦

4127. Variable spot shaping for electron-beam lithography. (USA)

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

4126. Double-aperture method of producin

📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 178 KB

Variable-shaped e-beam lithography enabl

✍ Philipp Jaschinsky; Jens-Wolfram Erben; Kang-Hoon Choi; Knut Schulze; Manuela Gu 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 787 KB

Single crystal LaB6 electron gun for var

📂 Article 📅 1981 🏛 Elsevier Science 🌐 English ⚖ 162 KB

4084. Design of a variable-aperture proj

📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 177 KB

High throughput variable shaped electron

📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 132 KB

High throughput variable shaped electron

📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 97 KB