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High throughput variable shaped electron beam lithography: B. P. Piwczyk and A. E. Williams Solid St. Technol. 145 (September 1983)

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 97 KB
Volume: 17
Category: Article
ISSN: 0026-2692
DOI: 10.1016/s0026-2692(86)80038-6

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High throughput variable shaped electron

High throughput variable shaped electron beam lithography : B. P. Piwczyk and A. E. Williams. Solid St. Technol. 145 (September 1983)

📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 132 KB