✦ LIBER ✦
High throughput variable shaped electron beam lithography : B. P. Piwczyk and A. E. Williams. Solid St. Technol. 145 (September 1983)
- Publisher
- Elsevier Science
- Year
- 1984
- Tongue
- English
- Weight
- 132 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0026-2714
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