✦ LIBER ✦
Variable-shaped e-beam lithography enabling process development for future copper damascene technology
✍ Scribed by Philipp Jaschinsky; Jens-Wolfram Erben; Kang-Hoon Choi; Knut Schulze; Manuela Gutsch; Frieder Blaschta; Martin Freitag; Stefan E. Schulz; Katja Steidel; Christoph Hohle; Thomas Gessner; Peter Kuecher
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 787 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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