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Post-deposition annealing of RF-sputtered zinc-oxide films

✍ Scribed by H.H.P.Th. Bekman; K.W. Benoist; J.L. Joppe

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 381 KB
Volume: 70-71
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90455-k

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