Positron study of electron irradiation-induced vacancy defects in SiC
β Scribed by A. Kawasuso; M. Yoshikawa; H. Itoh; R. Krause-Rehberg; F. Redmann; T. Higuchi; K. Betsuyaku
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 184 KB
- Volume
- 376-377
- Category
- Article
- ISSN
- 0921-4526
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β¦ Synopsis
Based on positron annihilation experiments, we have proposed that in 3C-SiC isolated silicon vacancies are responsible for positron trapping after electron irradiation. We have also proposed that in hexagonal SiC one type of vacancy defects survives after annealing at 1000 1C which is attributable to carbon-vacancy-carbon-antisite complexes or silicon-vacancy-nitrogen pairs, while carbon vacancies, silicon vacancies and divacancies are excluded. In this study, from the theoretical calculations of positron lifetime and Doppler broadening of annihilation radiation, the above proposals are confirmed.
π SIMILAR VOLUMES
The impact of radiation damage on the device performance of 4H-SiC metal Schottky field effect transistors, which are irradiated at room temperature with 2-MeV electrons, is studied. No performance degradation is observed by 1 Γ 10 15 e=cm 2 , while a slight increase of the linear drain current toge