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Porous low dielectric constant materials for microelectronics

✍ Scribed by Baklanov, Mikhail R. (author);Maex, Karen (author)

Book ID: 126944596
Publisher: Royal Society
Year: 2005
Tongue: English
Weight: 518 KB
Volume: 364
Category: Article
ISSN: 0264-3952
DOI: 10.1098/rsta.2005.1679

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