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Low Dielectric Constant Materials for IC Applications


Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
561 KB
Volume
6
Category
Article
ISSN
1369-7021

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Low dielectric constant materials for in
โœ H. Treichel; G. Ruhl; P. Ansmann; R. Wรผrl; Ch. Mรผller; M. Dietlmeier ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 752 KB

The more advanced an integrated circuit becomes, the more stringent are the demands for certain properties of a dielectric or insulating material. In addition, it is essential that the layer maintain its specific electrical, physical and chemical properties after incorporation in the device structur