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Porosity engineering in glancing angle deposition thin films

โœ Scribed by M.O. Jensen; M.J. Brett

Book ID
106019527
Publisher
Springer
Year
2005
Tongue
English
Weight
357 KB
Volume
80
Category
Article
ISSN
1432-0630

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Glancing angle deposition (GLAD) was used to sculpt chromium thin films sputter deposited by dc magnetron sputtering into the desired zigzag microstructure. The flux angle of incident species ฮฑ was systematically varied from 0 to 50 โ€ข and periodically changed from ฮฑ to -ฮฑ. The total film thickness w