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Structure and optical properties of ZnS thin films grown by glancing angle deposition

โœ Scribed by Sumei Wang; Xiaoyong Fu; Guodong Xia; Jianguo Wang; Jianda Shao; Zhengxiu Fan


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
301 KB
Volume
252
Category
Article
ISSN
0169-4332

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Glancing angle deposition to control mic
โœ Jan Lintymer; Nicolas Martin; Jean-Marie Chappe; Jamal Takadoum ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 942 KB

Glancing angle deposition (GLAD) was used to sculpt chromium thin films sputter deposited by dc magnetron sputtering into the desired zigzag microstructure. The flux angle of incident species ฮฑ was systematically varied from 0 to 50 โ€ข and periodically changed from ฮฑ to -ฮฑ. The total film thickness w