Polymer Viscoelasticity and Residual Stress Effects on Nanoimprint Lithography

✍ Scribed by Y. Ding; H. W. Ro; J. F. Douglas; R. L. Jones; D. R. Hine; A. Karim; C. L. Soles

• Book ID: 101418298
• Publisher: John Wiley and Sons
• Year: 2007
• Tongue: English
• Weight: 142 KB
• Volume: 19
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.200601998