Stamp deformation and its influence on residual layer homogeneity in thermal nanoimprint lithography

✍ Scribed by S. Merino; A. Retolaza; H. Schift; V. Trabadelo

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 750 KB
• Volume: 85
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2008.01.045