✦ LIBER ✦
Modeling and simulation of stamp deflections in nanoimprint lithography: Exploiting backside grooves to enhance residual layer thickness uniformity
✍ Scribed by Hayden Taylor; Kristian Smistrup; Duane Boning
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 463 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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