✦ LIBER ✦

Polyenergy ion beam synthesis of buried oxynitride layer in silicon

✍ Scribed by M.Yu. Barabanenkov; Yu.A. Agafonov; V.N. Mordkovich; A.N. Pustovit; A.F. Vyatkin; V.I. Zinenko

Book ID: 114164214
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 172 KB
Volume: 171
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(00)00261-5

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion beam synthesis of buried oxide layer

Ion beam synthesis of buried oxide layers in silicon carbide

✍ Manabu Ishimaru; Robert M Dickerson; Kurt E Sickafus 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 384 KB

Peculiarities of buried silicon oxynitri

Peculiarities of buried silicon oxynitride layer synthesis by sequential oxygen and nitrogen ion implantation in silicon

✍ A.B. Danilin; K.A. Drakin; V.V. Kukin; A.A. Malinin; V.N. Mordkovich; A.F. Petro 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 282 KB

Synthesis of buried silicon oxynitride l

Synthesis of buried silicon oxynitride layers by ion implantation for silicon-on-insulator (SOI) structures

✍ A.D. Yadav; Rucha H. Polji; Vibha Singh; S.K. Dubey; T.K. Gundu Rao 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 252 KB

Silicon oxynitride (Si x O y N z ) buried insulating layers were synthesized by SIMNOX (separation by implanted nitrogen-oxygen) process by 14 N + and 16 O + ion implantation to high fluence levels 1 • 10 17 , 2.5 • 10 17 and 5 • 10 17 ions cm À2 sequentially in the ratio 1:1 at 150 keV into p-type

Ion beam synthesis of thin buried layers

Ion beam synthesis of thin buried layers of SiO2 in silicon

✍ PLF Hemment; KJ Reeson; JA Kilner; RJ Chater; C Marsh; GR Booker; GK Celler; J S 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 590 KB

Buried layers of silicon oxy-nitride fab

Buried layers of silicon oxy-nitride fabricated using ion beam synthesis

✍ K.J. Reeson; P.L.F. Hemment; C.D. Meekison; C.D. Marsh; G.R. Booker; R.J. Chater 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 817 KB

Precipitation kinetics in silicon during

Precipitation kinetics in silicon during ion beam synthesis of buried silicide layers

✍ H. Trinkaus; S. Mantl 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 417 KB