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Polycrystalline silicon thin films on glass substrate

โœ Scribed by D. Dimova-Malinovska; O. Angelov; M. Sendova-Vassileva; M. Kamenova; J.-C. Pivin


Book ID
113936561
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
516 KB
Volume
451-452
Category
Article
ISSN
0040-6090

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The impact of RCA treatment of glass sub
โœ O.O. Awadelkarim; Y.Z. Wang ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 291 KB

We report on the effects of RCA leaching of glass substrates on the performance and hot-carrier reliability of n-channel and p-channel polycrystalline silicon (poly-Si) thin-film transistors (TFTs). The characteristics of the TFTs on RCA-treated glass are contrasted to those of TFTs on untreated gla