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Activation of ion-implanted polycrystalline silicon thin films prepared on glass substrates

✍ Scribed by Byoung-Soo So; Seung-Muk Bae; Yil-Hwan You; Young-Hwan Kim; Jin-Ha Hwang


Book ID
119322494
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
706 KB
Volume
47
Category
Article
ISSN
0025-5408

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