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Polycrystalline silicon thin film transistors fabricated in various solid phase crystallized films deposited on glass substrates

✍ Scribed by Dimitrios N. Kouvatsos; Apostolos T. Voutsas; Miltiadis K. Hatalis


Publisher
Springer US
Year
1999
Tongue
English
Weight
641 KB
Volume
28
Category
Article
ISSN
0361-5235

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The impact of RCA treatment of glass sub
✍ O.O. Awadelkarim; Y.Z. Wang πŸ“‚ Article πŸ“… 1999 πŸ› Elsevier Science 🌐 English βš– 291 KB

We report on the effects of RCA leaching of glass substrates on the performance and hot-carrier reliability of n-channel and p-channel polycrystalline silicon (poly-Si) thin-film transistors (TFTs). The characteristics of the TFTs on RCA-treated glass are contrasted to those of TFTs on untreated gla