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Polycrystalline-silicon LPCVD by silane pyrolysis: The effect of hydrogen injection

✍ Scribed by V. G. Erkov; S. F. Devyatova

Book ID
110214294
Publisher
Springer
Year
2007
Tongue
English
Weight
155 KB
Volume
36
Category
Article
ISSN
1063-7397

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πŸ“œ SIMILAR VOLUMES

On Chemical Kinetics of Silicon Depositi
On Chemical Kinetics of Silicon Deposition from Silane (V) The Effect of Hydrogen Formation
✍ Dr. sc. H. KΓΌhne πŸ“‚ Article πŸ“… 1991 πŸ› John Wiley and Sons 🌐 English βš– 414 KB

In consequence of hydrogen formation during silane pyrolysis total gas volume increases, when the reaction proceeds at constant total pressure. Any mole of silane decomposed produces two moles of hydrogen. In the present paper expressions are derived for 1' ' and 0.5Ih reaction order describing axia