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Modeling and optimization of the growth of polycrystalline silicon films by thermal decomposition of silane

โœ Scribed by G. Peev; L. Zambov; Y. Yanakiev


Book ID
107790369
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
697 KB
Volume
106
Category
Article
ISSN
0022-0248

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