✦ LIBER ✦
Simulation of silicon film growth by silane decomposition in a mercury-sensitized photo-CVD process
✍ Scribed by Ju Hyung Lee; Sang Heup Moon; Shi-Woo Rhee
- Book ID
- 110630156
- Publisher
- Springer US
- Year
- 1992
- Tongue
- English
- Weight
- 760 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0256-1115
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