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The simultaneous growth of monocrystalline and polycrystalline silicon films with controlled parameters

✍ Scribed by A.G. Abdullayev; F.D. Kasimov; V.M. Mamikonova

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 419 KB
Volume: 115
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(84)90184-6

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