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Polishing technique developed for non-spherical surfaces


Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
139 KB
Volume
11
Category
Article
ISSN
0141-6359

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New spectroscopic ellipsometry techniques are very promising for the non-destructive surface analysis of thin films on metals. Infrared spectroscopic ellipsometry allows the morphological and chemical characterization of these films, and recent results are presented here.