Spectroscopic Ellipsometry: a Non-destru
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T. Schram; A. Franquet; H. Terryn; J. Vereecken
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Article
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1999
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John Wiley and Sons
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English
β 243 KB
New spectroscopic ellipsometry techniques are very promising for the non-destructive surface analysis of thin films on metals. Infrared spectroscopic ellipsometry allows the morphological and chemical characterization of these films, and recent results are presented here.