✦ LIBER ✦
A newly developed polishing pad for achieving high surface flatness without edge roll off
✍ Scribed by T. Enomoto; U. Satake; T. Miyake; N. Tabata
- Publisher
- International Academy for Production Engineering
- Year
- 2011
- Tongue
- English
- Weight
- 405 KB
- Volume
- 60
- Category
- Article
- ISSN
- 0007-8506
No coin nor oath required. For personal study only.