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Point defect engineering in preamorphized silicon enriched with fluorine

โœ Scribed by G. Impellizzeri; S. Mirabella; F. Priolo; E. Napolitani; A. Carnera

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
234 KB
Volume
253
Category
Article
ISSN
0168-583X

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