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Plasma sources — The key to production x-ray lithography?

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📜 SIMILAR VOLUMES

X-ray lithography with laser-plasma sour

✍ I. Toubhans; R. Fabbro; B. Faral; M. Chaker; H. Pepin 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 225 KB

Plasma focus as a radiation source for x

✍ J. Eberle; H. Krompholz; R. Lebert; W. Neff; R. Noll 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 279 KB

Issues of laser plasma sources for soft

✍ L. Shmaenok; F. Bijkerk; E. Louis; A. van Honk; M.J. van der Wiel; Yu. Platonov; 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 371 KB

Calibration of an excimer laser-plasma s

✍ ICE Turcu; JR Maldonado; IN Ross; H Shields; P Trenda; D Batani; P Fluck; H Good 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 330 KB

Effect of cylindrical spot shape in gas

✍ J.R. Maldonado; H.K. Oertel; M. Weiss 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 554 KB

Measurement of the effective wavelength

✍ Juan R. Maldonado; Inna Babich; L.C. Hsia; R. Rippstein; A. Flamholz; Vincent Di 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 317 KB