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Plasma recovery in plasma immersion ion implantation: dependence on pulse frequency and duty cycle

✍ Scribed by Briehl, Boris; Urbassek, Herbert M

Book ID: 127197044
Publisher: Institute of Physics
Year: 2002
Tongue: English
Weight: 515 KB
Volume: 35
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/35/5/308

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