Plasma processing for VLSI

Plasma Processing for VLSI

✍ Norman G. Einspruch 📂 Library 📅 1984 🏛 Academic Pr 🌐 English

Plasma Etching Processes for Interconnec

📁 Plasma Etching Processes for Interconnect Realization in VLSI

✍ Nicolas Posseme 📂 Library 📅 2015 🏛 Elsevier 🌐 English

This is the first of two books presenting the challenges and future prospects of plasma etching processes for microelectronics, reviewing the past, present and future issues of etching processes in order to improve the understanding of these issues through innovative solutions.<br><br>This book focu

Plasma Etching Processes for Interconnec

📁 Plasma Etching Processes for Interconnect Realization in VLSI

✍ Nicolas Posseme 📂 Library 📅 2015 🏛 Elsevier 🌐 English

This is the first of two books presenting the challenges and future prospects of plasma etching processes for microelectronics, reviewing the past, present and future issues of etching processes in order to improve the understanding of these issues through innovative solutions.<br><br>This book focu

Silicon Processing for the VLSI Era: Pro

📁 Silicon Processing for the VLSI Era: Process Integration

✍ Stanley Wolf, Richard N. Tauber 📂 Library 📅 1990 🏛 Lattice Press 🌐 English

The companion volumes to this book are Volume 1- Process Technology and Volume 3- The Submicron MOSFET

Silicon Processing for the VLSI Era: Pro

📁 Silicon Processing for the VLSI Era: Process Technology

✍ Stanley Wolf, Richard N. Tauber 📂 Library 📅 1999 🏛 Lattice Press 🌐 English

Plasma processes for semiconductor fabri

📁 Plasma processes for semiconductor fabrication

✍ W. N. G. Hitchon 📂 Library 📅 1999 🏛 CUP 🌐 English

Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes, and shows how they can be a

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