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Plasma polymer thin films of zinc phthalocyanies for NO2gas sensor device

✍ Scribed by N. Inagaki; S. Tasaka; Y. Sei

Publisher
Springer
Year
1996
Tongue
English
Weight
403 KB
Volume
36
Category
Article
ISSN
0170-0839

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Polycrystalline zinc oxide thin films with thicknesses in the range 0.3 ~m-1 #m were deposited on silicon and alumina substrates by a spray chemical vapour deposition method. The film was characterized for crystallinity, resistivity and carrier concentration. A modified heterostructure Pd/ZnO(0.38 ~