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Plasma oxidation of Si and SiGe

✍ Scribed by I.G. Goh; J.F. Zhang; S. Hall; W. Eccleston; K. Werner

Book ID: 103599402
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 317 KB
Volume: 28
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(95)00048-d

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