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Plasma Immersion Ion Implantation Into Inner Surface of Cylindrical Bore Using Moving Auxiliary Electrode

✍ Scribed by Wang, Peng; Tian, Xiubo; Gong, Chunzhi; Yang, Shiqin; Chu, Paul K.

Book ID: 118064182
Publisher: IEEE
Year: 2011
Tongue: English
Weight: 527 KB
Volume: 39
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2011.2162751

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