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Plasma immersion ion implantation into cylindrical bore using internal inductively-coupled radio-frequency discharge

✍ Scribed by Z.J. Wang; X.B. Tian; C.Z. Gong; J.W. Shi; S.Q. Yang; Ricky K.Y. Fu; Paul K. Chu

Book ID: 116893323
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 747 KB
Volume: 206
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2012.05.118

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