✦ LIBER ✦
Improve retained dose and impact energy of inner surface plasma immersion ion implantation using long pulse duration with deflecting electric field
✍ Scribed by A Liu; X Wang; B Tang
- Book ID
- 108422972
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 106 KB
- Volume
- 149
- Category
- Article
- ISSN
- 0257-8972
No coin nor oath required. For personal study only.