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Plasma immersion ion implantation into cylindrical bore using internal inductively-coupled radio-frequency discharge

โœ Scribed by Wang, Z.J.; Tian, X.B.; Gong, C.Z.; Shi, J.W.; Yang, S.Q.; Fu, Ricky K.Y.; Chu, Paul K.

Book ID
121192765
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
427 KB
Category
Article
ISSN
0257-8972

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Plasma immersion ion implantation of cyl
Plasma immersion ion implantation of cylindrical bore using self-excited radio-frequency glow discharge
โœ C.Z. Gong; Z.T. Zhu; J.W. Shi; S.Q. Yang; X.B. Tian; P.K. Chu ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 532 KB

Plasma immersion ion implantation (PIII) is an effective surface processing technique. However, it is still difficult to implant the inner wall of a cylindrical bore using this technique due to the internal small-volume effect. This paper presents a new approach based on self-excited radio-frequency