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Plasma etching of silicides and polycides in very-large-scale integration technology

✍ Scribed by L. Peccoud; Ph. Laporte

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 584 KB
Volume: 140
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(86)90168-9

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