✦ LIBER ✦

Ion-beam-induced silicidation and its use in very-large-scale integration processing

✍ Scribed by K. Maex; L. Van den Hove; R.F. De Keersmaecker

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma etching of silicides and polycide

✍ L. Peccoud; Ph. Laporte 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 584 KB

Prospects and challenges for molecular b

✍ W. Eccleston 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 212 KB

Concurrent error detection and fault-tol

📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 217 KB