Prospects and challenges for molecular beam epitaxy in silicon very-large-scale integration

✍ Scribed by W. Eccleston

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 212 KB
• Volume: 184
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(90)90443-h