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Plasma etching of amorphous GeSx thin films

✍ Scribed by Z.G. Ivanova; E.D. Atanassova; A. Toneva

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 252 KB
Volume: 136
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(86)90114-8

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