✦ LIBER ✦

Plasma-enhanced CVD of TiN and Ti using low-pressure and high-density helicon plasma

✍ Scribed by Ryoki Tobe; Atsushi Sekiguchi; Masao Sasaki; Osamu Okada; Naokichi Hosokawa

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Aspects of TiN and Ti deposition in an E

✍ A. Weber; R. Nikulski; C.-P. Klages; M.E. Gross; R.M. Charatan; R.L. Opilan; W.L 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 512 KB

Chemical and electrical characteristics

✍ Juho Song; G.S. Lee; P.K. Ajmera 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 506 KB

Enhancement of wettability in low densit

✍ Rosa M. Sanchis; Oscar Calvo; Lourdes Sánchez; David García; Rafael Balart 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 353 KB

Comparison of the coatings deposited usi

✍ Zhengping Mao; Jing Ma; Jun Wang; Baode Sun 📂 Article 📅 2009 🏛 Springer 🌐 English ⚖ 651 KB

Improvement of the electrical properties

✍ Chuan Jie Zhong; Hiroaki Tanaka; Shigetoshi Sugawa; Tadahiro Ohmi 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 162 KB

Anion-exchange high-performance liquid c

✍ Jun Haginaka; Yu Yamaguchi; Masaru Kunitomo 📂 Article 📅 2001 🏛 Elsevier Science ⚖ 143 KB