𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Plasma-enhanced chemical vapour deposition of A1N (1010) on Si (100): Microstructural study of the interlayers

✍ Scribed by N. Azéma; J. Durand; R. Berjoan; C. Dupuy; J.L. Balladore; L. Cot

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
866 KB
Volume
129
Category
Article
ISSN
0022-0248

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The influence of titanium interlayers on
The influence of titanium interlayers on the adhesion of titanium nitride coatings obtained by plasma-assisted chemical vapour deposition
✍ S.J. Bull; P.R. Chalker; C.F. Ayres; D.S. Rickerby 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 544 KB

The use of a thin titanium interlayer has been found to considerably improve the adhesion of titanium nitride coatings produced by physical vapour deposition (PVD). This is believed to arise from two factors: the dissolution of weak native oxide layers by the titanium (a chemical gettering effect) a