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Plasma diagnostics for the control of reactive magnetron deposition process

✍ Scribed by F. Perry; B. Stauder; G. Henrion; Ph. Pigeat

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

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✍ Fabio Palumbo; Pietro Favia; Michele Vulpio; Riccardo d'Agostino 📂 Article 📅 2001 🏛 Springer 🌐 English ⚖ 64 KB

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✍ Takenaka, Kosuke; Setsuhara, Yuichi; Ebe, Akinori 📂 Article 📅 2013 🏛 Institute of Pure and Applied Physics 🌐 English ⚖ 875 KB

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✍ A. P. Burmakou, V. N. Kuleshov 📂 Article 📅 2012 🏛 Springer US 🌐 English ⚖ 185 KB