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Plasma chemical vapor deposition of thin carbon nitride films utilizing transport reactions

✍ Scribed by C Popov; M.F Plass; R Kassing; W Kulisch

Book ID: 114086808
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 420 KB
Volume: 355-356
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(99)00457-5

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