Plasma-chemical synthesis of silicon carbonitride films from trimethyl(diethylamino)silane

✍ Scribed by M. L. Kosinova; Yu. M. Rumyantsev; L. I. Chernyavskii; L. D. Nikulina; V. G. Kesler; E. A. Maximovskii; N. I. Fainer; V. I. Rakhlin; M. G. Voronkov; F. A. Kuznetsov

• Book ID: 111468169
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2010
• Tongue: English
• Weight: 569 KB
• Volume: 36
• Category: Article
• ISSN: 1087-6596
• DOI: 10.1134/s1087659610040152