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Characterization of some trimethyl(organylamino)silanes—precursors for preparation of silicon carbonitride films

✍ Scribed by V. I. Rakhlin; I. P. Tsirendorzhieva; M. G. Voronkov; L. D. Nikulina; S. V. Sysoev; M. L. Kosinova

No coin nor oath required. For personal study only.

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