Tris(diethylamino)silane—A new precursor compound for obtaining layers of silicon carbonitride

✍ Scribed by N. I. Fainer; A. N. Golubenko; Yu. M. Rumyantsev; V. G. Kesler; B. M. Ayupov; V. I. Rakhlin; M. G. Voronkov

• Book ID: 114994021
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2012
• Tongue: English
• Weight: 619 KB
• Volume: 38
• Category: Article
• ISSN: 1087-6596
• DOI: 10.1134/s1087659612010051