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Planarization and Processing of Metamorphic Buffer Layers Grown by Hydride Vapor-Phase Epitaxy

✍ Scribed by Zutter, Brian T.; Schulte, Kevin L.; Kim, Tae Wan; Mawst, Luke J.; Kuech, T. F.; Foran, Brendan; Sin, Yongkun

Book ID: 121610004
Publisher: Springer US
Year: 2013
Tongue: English
Weight: 417 KB
Volume: 43
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-013-2839-x

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