PIXE depth profiling using variation of detection angle

✍ Scribed by J. Miranda; J. Rickards; R. Trejo-Luna

• Book ID: 103861308
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 127 KB
• Volume: 249
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2006.04.062

✦ Synopsis

A method to apply particle induced X-ray emission (PIXE) for depth profiling, based on the variation of the X-ray detection angle, is proposed. The procedure uses X-ray yields normalized to those emitted at a particular reference angle. Application of the method to implanted samples and thin metallic films gave excellent results regarding the range of implanted ions and film thickness, respectively. However, there is no complete information about the width of the distribution of the implanted ions, emphasizing the need to develop a full mathematical algorithm to obtain the general depth profile.