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Depth Profiling of Stratified Layers Using Variable-Angle ATR

✍ Scribed by Shick, Robert A.; Koenig, Jack L.; Ishida, Hatsuo

Book ID
115362817
Publisher
Society for Applied Spectroscopy
Year
1996
Tongue
English
Weight
578 KB
Volume
50
Category
Article
ISSN
0003-7028

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A method to apply particle induced X-ray emission (PIXE) for depth profiling, based on the variation of the X-ray detection angle, is proposed. The procedure uses X-ray yields normalized to those emitted at a particular reference angle. Application of the method to implanted samples and thin metalli